JPS6320916U - - Google Patents

Info

Publication number
JPS6320916U
JPS6320916U JP11508486U JP11508486U JPS6320916U JP S6320916 U JPS6320916 U JP S6320916U JP 11508486 U JP11508486 U JP 11508486U JP 11508486 U JP11508486 U JP 11508486U JP S6320916 U JPS6320916 U JP S6320916U
Authority
JP
Japan
Prior art keywords
filter
outside
installation board
board
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11508486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0141462Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11508486U priority Critical patent/JPH0141462Y2/ja
Publication of JPS6320916U publication Critical patent/JPS6320916U/ja
Application granted granted Critical
Publication of JPH0141462Y2 publication Critical patent/JPH0141462Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP11508486U 1986-07-25 1986-07-25 Expired JPH0141462Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11508486U JPH0141462Y2 (en]) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11508486U JPH0141462Y2 (en]) 1986-07-25 1986-07-25

Publications (2)

Publication Number Publication Date
JPS6320916U true JPS6320916U (en]) 1988-02-12
JPH0141462Y2 JPH0141462Y2 (en]) 1989-12-07

Family

ID=30998415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11508486U Expired JPH0141462Y2 (en]) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPH0141462Y2 (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02223661A (ja) * 1989-02-27 1990-09-06 Masanori Okamoto エアーフィルター清浄装置
JPH034914A (ja) * 1989-05-22 1991-01-10 Kinzo Kanda エアクリーナのクリーニング装置
JPH11319453A (ja) * 1998-05-08 1999-11-24 Shigenori Yamazaki エアフィルタ用エレメントの清掃装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02223661A (ja) * 1989-02-27 1990-09-06 Masanori Okamoto エアーフィルター清浄装置
JPH034914A (ja) * 1989-05-22 1991-01-10 Kinzo Kanda エアクリーナのクリーニング装置
JPH11319453A (ja) * 1998-05-08 1999-11-24 Shigenori Yamazaki エアフィルタ用エレメントの清掃装置

Also Published As

Publication number Publication date
JPH0141462Y2 (en]) 1989-12-07

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